Low threshold voltage ZnO thin film transistor with a Zn0.7Mg0.3O gate dielectric for transparent electronics

Kekuda, Dhananjaya and Krupanidhi, S B (2007) Low threshold voltage ZnO thin film transistor with a Zn0.7Mg0.3O gate dielectric for transparent electronics. Journal of Applied Physics, 101 (12). pp. 1-6.

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Abstract

A highly transparent all ZnO thin film transistor �ZnO-TFT� with a transmittance of above 80% in the visible part of the spectrum, was fabricated by direct current magnetron sputtering, with a bottom gate configuration. The ZnO-TFT with undoped ZnO channel layers deposited on 300 nm ,n0.7Mg0.3O gate dielectric layers attains an on/off ratio of 104 and mobility of 20 cm2 /V s. The capacitance-voltage �C−V� characteristics of the ZnO-TFT exhibited a transition from depletion to accumulation with a small hysteresis indicating the presence of oxide traps. The trap density was also computed from the Levinson’s plot. The use of Zn0.7Mg0.3O as a dielectric layer adds additional dimension to its applications. The room temperature processing of the device depicts the possibility of the use of flexible substrates such as polymer substrates. The results provide the realization of transparent electronics for next-generation optoelectronics

Item Type: Article
Uncontrolled Keywords: Low voltage gate oxide, Thin film transistor
Subjects: Engineering > MIT Manipal > Physics
Depositing User: MIT Library
Date Deposited: 28 Aug 2013 09:11
Last Modified: 28 Aug 2013 09:11
URI: http://eprints.manipal.edu/id/eprint/136948

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