Effect of electron irradiation on morphological, compositional and electrical properties of nanocluster carbon thin films grown using room temperature based cathodic arc process for large area microelectronics

Shounak, De and Satyanarayana, B S and Sanjeev, Ganesh and Ramakrishna, K and Rao, Mohan K and Pattabi, Manjunatha (2014) Effect of electron irradiation on morphological, compositional and electrical properties of nanocluster carbon thin films grown using room temperature based cathodic arc process for large area microelectronics. Microelectronics Reliability, 54. pp. 2740-2746. ISSN 0026-2714

[img] PDF
shounak.pdf - Published Version
Restricted to Registered users only

Download (1MB) | Request a copy
Official URL: http://www.elsevier.com/locate/microrel

Abstract

The influence of 8 MeV electron beam bombardment on room temperature grown nanocluster carbon using cathodic arc process has been studied here. Atomic force microscopy (AFM) study shows that surface roughness varies with varying electron doses. High doses of electrons could causes thermal induce graphitization and morphological changes in the films. Raman spectroscopy analysis reveals that G-peak vary from 1555 cm_1 to 1570 cm_1 and D-peak varying from 1361 cm_1 to 1365 cm_1 indicating the disorderness and presence of both graphitic and diamond-like phases. Room temperature conductivity changes by two to three orders in magnitude. The conductivity in the films could be due to conduction of charge carriers through neighboring islands of conductive chains. Defect states calculated using the differential technique varies from 8x1017 cm-3 eV-1 to 1.5 _ 1019 cm cm-3 eV-1. Irradiation of nanocluster carbon thin films could be helpful to tune the electrical properties and defect densities of the nanocluster carbon films for various large area, flexible electronic and nano electronic applications.

Item Type: Article
Uncontrolled Keywords: Nanocluster carbon thin films Cathodic arc process, Raman spectroscopy ,Electron irradiation ,Defect density,Electrical conductivity
Subjects: Engineering > MIT Manipal > Electronics and Communication
Engineering > MIT Manipal > Physics
Depositing User: MIT Library
Date Deposited: 12 Dec 2014 05:54
Last Modified: 12 Dec 2014 05:54
URI: http://eprints.manipal.edu/id/eprint/141255

Actions (login required)

View Item View Item