Meenatchisundaram, S (2017) Design, simulation and optimization of micro Pressure sensors. Phd. Thesis thesis, Manipal Institute of Technology, Manipal.

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Abstract

New and improved methods of sensor design are constantly being developed over the years. As technology grows up, the challenges faced by design engineers are also increasing drastically. Micro pressure sensors have captured their market because of their wide range of application from very low to very high pressure measurements. Pressure sensors used in biomedical applications need to be restricted in size and to be made biocompatible, whereas the pressure sensors used in industries needs to survive in harsh environmental conditions. These application requirements drive and impose tremendous conditions on sensor design to overcome tedious design and fabrication procedure before its reality

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