Structural, spectroscopic and electrical properties of dc magnetron sputtered NiO thin flms and an insight into diferent defect states

Salunkhe, Parashurama and Ali, Muhammed A V and Kekuda, Dhananjaya (2021) Structural, spectroscopic and electrical properties of dc magnetron sputtered NiO thin flms and an insight into diferent defect states. Applied Physics A: Materials Science and Processing, 127 (390). ISSN 0947-8396

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Abstract

In this article, we report a detailed study on the infuence of sputter power on physical properties of the NiO flms grown by DC magnetron sputtering. Structural studies carried out by Grazing Incidence X-ray difraction (XRD) reveals the polycrys�talline nature of the flms with FCC phase. The crystallographic orientation (111) plane followed by (200), (220), and (311) plane were evident from the XRD spectra. The average crystallites sizes were estimated from the spectra, and the values were compared using three diferent plots such as Scherrer, Williamson–Hall and size–strain plot. The surface morphology was carried out by atomic force microscopy. The deposited samples show semitransparent behavior in the visible region and the estimated band gap increased from 2.70 to 3.34 eV with an increase in sputter power. Furthermore, X-ray photoelectron spectroscopy (XPS) core-level Ni2p spectra were deconvoluted and the observed Ni2p3/2, Ni2p1∕2 domain along with their satellite’s peaks were analyzed. Most importantly, XPS quantifcation data and Raman spectra confrm the presence of both Ni2+ and Ni3+ states in the NiO flms. The electrical properties carried at room temperature revealed that the resistivity of the flm signifcantly increased and a mobility of~84 cm2V−1 s−1 was obtained

Item Type: Article
Uncontrolled Keywords: NiO · Sputtering · XPS · Ni2p-O1s spectra · Ni2+ and Ni3+ state · Raman spectroscopy
Subjects: Engineering > MIT Manipal > Physics
Depositing User: MIT Library
Date Deposited: 05 Oct 2021 09:33
Last Modified: 05 Oct 2021 09:33
URI: http://eprints.manipal.edu/id/eprint/157481

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