A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor

Simha, Ashwin and Kulkarni, S M and Bhat, Somesakara and Meenatchisundaram, S (2011) A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor. In: 2nd International conference on Methods and Models in Science & Technology, 19–20 November , Jaipur, India.

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Abstract

The response of a capacitive pressure sensor is generally represented by a fourth order partial differential equation which is complex to solve and does not possess an exact solution. Several attempts have been made earlier through various techniques such as the Galerkin method, Finite Difference Method etc... . In this paper an attempt has been made to develop a simple approximate analytical approach to determine the response of a micro capacitive pressure sensor whose diaphragm is designed to undergo very small deflections (typically less than 25% of the thickness). The non-uniform gap between the electrodes is mathematically expressed as a combination of the initial gap between the electrodes (in the undeformed state) and a displacement function in (x,y). The proposed displacement function is then utilized in evaluating the capacitance as a function of the applied pressure. The results obtained from the analytical approach are benchmarked against those obtained from COMSOL Multiphysics®, a popular Finite Element Analysis tool in the MEMS industry. It is observed that the results obtained from COMSOL Multiphysics® and those from the analytical approach are in good agreement with a maximum deviation of about 8.66%.

Item Type: Conference or Workshop Item (Paper)
Additional Information: © 2011 American Institute of Physics
Uncontrolled Keywords: non-uniform gap, simple approximate approach, displacement function, COMSOL Multiphysics®.
Subjects: Engineering > MIT Manipal > Electronics and Communication
Engineering > MIT Manipal > Instrumentation and Control
Depositing User: MIT Library
Date Deposited: 06 Mar 2013 11:20
Last Modified: 06 Mar 2013 11:20
URI: http://eprints.manipal.edu/id/eprint/78888

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