Meenatchisundaram, S and Kulkarni, S M and Venkateswaran, P R and Uma, G (2010) Design Analysis and Surface Micromachining Fabrication of Differential Micro Pressure Sensors. In: International Conference on System Dynamics and Control, 20th to 21st August 2010, Manipal Karnataka.

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Abstract

The aim of this paper is to analysis the design equations of a micro pressure sensor and to develop the fabrication steps using Surface Micromachining Technique. A circular, rigidly fixed diaphragm type differential pressure sensor with piezo-resistive deduction is considered in this paper. By limiting the maximum deflection, the analysis has been done with the applied pressure Vs radius. The maximum stress with applied pressure is also plotted from the design equations. MATLAB® is used as a tool to carry out the design analysis. INTELLISUITE® is used develop the differential micro pressure sensor using surface micromachining technique

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