Modeling and Analysis of Resonant beam Micro pressure Sensor

Ananya, R B and Ashwin, S and Prahlad, E and Gurukar, Shravan H S and Kulkarni, S M and Meenatchisundaram, S (2012) Modeling and Analysis of Resonant beam Micro pressure Sensor. In: National Conference on Smart Materials Structures and Systems, September 21-22, 2012, Coimbatore, India.

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The overall performance of a resonant beam micro pressure sensor largely depends on the mechanical aspects of the micro beam for its enhanced working. Mechanical features include the geometry of the micro beam, its support structure and positioning on the diaphragm of the resonant beam micro pressure sensor. The aim of this paper is to analyze the above listed issues for resonant beam micro pressure sensors and compares their sensitivities derived from ANSYS simulations to the theoretical value. Rayleigh-Ritz method which is based on the deflection of the beam is employed to arrive at an expression for the resonant frequency. The expression of deflection is particular to the given geometry of the diaphragm, which forms a basis to evaluate the stress and strain in the resonant beam micro pressure sensor. Finally, a comparison is made between the two types of beam configurations (Mounted and Etched beam configuration) used and the importance of the design parameter is outlined. The beam shape is further modified (Lumped mass beam and Serpentine beam configuration) to study its behavior and compare its sensitivities with the uniform beam

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Resonant Beam, Micro Pressure Sensor, Rayleigh-Ritz method, Geometry Optimization, Mounted Beam, Etched Beam
Subjects: Engineering > MIT Manipal > Instrumentation and Control
Depositing User: MIT Library
Date Deposited: 26 Mar 2013 09:56
Last Modified: 26 Mar 2013 09:56

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