Simha, Ashwin and Kulkarni, S M and Meenatchisundaram, S (2011) Comparison of various methods for the determination of resonant frequency of axially loaded MEMS resonator for pressure sensors. In: National Conference on Advances in Mechanical Engineering 2011, 03 – 05 January, 2011, MIT Manipal.

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Abstract

This paper deals with the various solution techniques for the determination of resonant frequency of axially loaded fixed beam MEMS resonators which form an indispensable part of pressure sensors, accelerometers, force sensors etc... working on the principle of shift in resonant frequency being proportional to the measurand (pressure, acceleration, force etc...). For the purpose of demonstration only the first mode of vibration of the fixed beam is discussed . The results obtained through COMSOL Multiphysics are benchmarked against the results obtained from the classical method and Rayleigh Ritz method. It is observed that the results obtained from COMSOL Multiphysics are in good agreement with classical method and Rayleigh-Ritz method

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